BME405C VTU Notes: MEMS Technology 2022 Scheme PDF

Explore the world of miniaturization with our BME405C VTU Notes. Master micro-sensors, actuators, and fabrication techniques for the 2022 Scheme at the all-new vtubuddy.in Mechanical and Microsystems resource portal.

Micro Electro Mechanical Systems

BME405C

2022 Scheme

Module 1 : MEMS

MEMS: Introduction, Production Engineering, Precision Engineering and Ultra- Precision Engineering, Integrated circuits, Micro Electro Mechanical Systems

Module 2 : Micromachining

Micromachining: Introduction, Photo Lithography, Structural and Sacrificial Materials, Etching, Surface Micromachining, Bulk versus Surface Micromachining, Wafer Bonding, LIGA

Module 3 : System Modelling

System Modelling: Introduction, Need for Modelling, System types, Basic Modelling Elements In Mechanical System, Basic Modelling Elements In Electrical Systems, Basic Modelling Elements In Fluid Systems and Thermal Systems.

Module 4 : Mechanical sensors and actuators

Mechanical sensors and actuators: Introduction, Principles of Sensing and Actuation, Beam and Cantilever, Micro Plates, Capacitive Effects, Piezo Electric Material as Sensing and Actuating Elements

Module 5 : Micro-Opto-Electro Mechanical Systems

Micro-Opto-Electro Mechanical Systems: Introduction, Fundamental Principles of MOEMS Technology, Review on Properties of Light, Light Modulators, Micro mirrors, Digital Micro mirror Device

Other Subject Notes

BME502

Model Question Papers

Previous Year Question Papers

Syllabus

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